Presentations

    Effects of annealing on optical properties of TiO2 planar waveguides, at Photonics West 2011 (San Francisco, CA), Tuesday, January 25, 2011:
    Titanium dioxide possesses a high second order nonlinear index, making it a potential material for all-optical switching. In order to exploit these properties, TiO2 thin films with high refractive indices and low losses are required. We deposit TiO2 waveguides via RF reactive sputtering onto oxidized silicon substrates. We find that film characteristics vary greatly with deposition temperature, suggesting that they may also exhibit strong sensitivity to post-deposition annealing. We annealed TiO2 thin films at various temperatures in an oxygen environment using a tube furnace. The annealed... Read more about Effects of annealing on optical properties of TiO2 planar waveguides