Low-loss TiO2 planar waveguides for nanophotonic applications, at IEEE Photonics Society Annual Meeting, IEEE Photonics Society (Denver, CO), Tuesday, November 9, 2010:
    We deposit TiO2 planar waveguides on oxidized silicon substrates by reactive sputtering. The films exhibit Raman spectra consistent with an amorphous or anatase phase and have losses as low as 0.4 dB/cm at 826 nm.