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Michael Moebius

Direct Laser Writing of 3D Gratings and Diffraction Optics, at CLEO: Science and Innovations Laser-Induced Structuring in Bulk Material (SW1K) (San Jose, CA), Wednesday, May 13, 2015:
talk_2486.pdf
We fabricate 3D gratings and diffraction optics using direct laser writing. Diffraction patterns of gratings agree with Laue theory. We demonstrate zone plates for visible wavelengths. Direct laser writing is promising for integrated diffraction optics.
Direct Laser Writing of 3-D Diffraction Gratings and Diffraction Optics, at MRS 2014 Fall Meeting and Exhibit, Symposium L: Optical Metamaterials and Novel Optical Phenomena Based on Nanofabricated Structures (Boston, MA), Thursday, December 4, 2014
Integrated diffractive optics has many applications in beam shaping and control on the micro-scale. Fabrication using lithography is limited to planar or layered geometries. We demonstrate fabrication of diffractive elements via direct laser writing. We have tested 3D diffraction gratings and zone plates designed for operation at visible wavelengths. Direct laser writing is a promising technique to fabricate integrated 3D and multi-layer diffraction optics. We have previously developed a laser writing technique that enables fabrication of disconnected metal structures in a polymer matrix,... Read more about Direct Laser Writing of 3-D Diffraction Gratings and Diffraction Optics
Hydrogenated amorphous silicon laser micromachining for photonic devices, at SPIE Photonics West 2013, Synthesis and Photonics of Nanoscale Materials X (San Francisco, CA), Tuesday, February 5, 2013
Abstract Development of integrated photonic devices is becoming increasingly important in technological applications. Hydrogenated amorphous silicon (a-Si:H) provides a promising platform. Variations in hydrogen content produce large changes in refractive index and band gap, on the order of 0.1-1. Previous research has demonstrated waveguide fabrication using photolithography and ion implantation techniques, which requires many steps and is limited to 2D patterns. We have developed a laser micromachining technique to locally reduce the hydrogen content of a-Si:H in the laser focus to... Read more about Hydrogenated amorphous silicon laser micromachining for photonic devices