@article {Bradley:689,
	title = {Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices},
	journal = {Optics Express},
	volume = {20},
	year = {2012},
	pages = {23821{\textendash}23831},
	abstract = {We demonstrate amorphous and polycrystalline anatase TiO2 thin films and submicrometer-wide waveguides with promising optical properties for microphotonic devices. We deposit both amorphous and polycrystalline anatase TiO2 using reactive sputtering and define waveguides using electron-beam lithography and reactive ion etching. For the amorphous TiO2, we obtain propagation losses of 0.12 dB/mm at 633 nm and 0.04 dB/mm at 1550 nm in thin films and 3 dB/mm at 633 nm and 0.4 {\textpm} 0.2 dB/mm at 1550 nm in waveguides. Using single-mode amorphous TiO2 waveguides, we characterize microphotonic features including microbends and optical couplers. We show transmission of 780-nm light through microbends having radii down to 2 μm and variable signal splitting in microphotonic couplers with coupling lengths of 10 μm.},
	doi = {10.1364/OE.20.023821},
	url = {/files/mazur/files/rep_689.pdf},
	author = {J. D.B. Bradley and C. C. Evans and J. Choy and O. Reshef and P. Deotare and F. Parsy and K. Phillips and Loncar, M. and Mazur, E.}
}
