@conference {Carey:442,
	title = {Femtosecond Laser-Assisted Microstructuring of Silicon for Novel Detector, Sensing and Display Technologies},
	year = {2003},
	publisher = {LEOS 2003},
	organization = {LEOS 2003},
	abstract = {Arrays of sharp, conical microstructures are obtained by stucturing the surface of a silicon wafer using femtosecond laser-assisted chemical etching. The one step, maskless structuring process drastically changes the optical, material and electronic properties of the original silicon wafer. These properties make microstructured silicon viable for use in a wide range of commercial devices including solar cells, infrared photodetectors, chemical and biological sensors, and field emission devices.},
	keywords = {AR, Tuscon},
	url = {/files/mazur/files/pub_442.pdf},
	author = {J. E. Carey and Mazur, E.}
}
