@article {Her:55,
	title = {Microstructuring of silicon with femtosecond laser pulses},
	journal = {Appl. Phys. Lett.},
	volume = {73},
	year = {1998},
	pages = {1673{\textendash}1675},
	abstract = {We report that silicon surfaces develop an array of sharp conical spikes when irradiated with 500 laser pulses of 100-fs duration, 10-kJ/m2 fluence in 500-torr SF6 or Cl2. The spikes are up to 40-m tall, and taper to about 1-m diameter at the tip. Irradiation of silicon surfaces in N2, Ne, or vacuum creates structured surfaces, but does not create the sharp conical spikes.},
	doi = {10.1016/0030-4018(92)90104-Y},
	url = {/files/mazur/files/rep_55.pdf},
	author = {T. Her and R. J. Finlay and Wu, C. and S. Deliwala and Mazur, E.}
}
