@article {Myers:595, title = {Enhancing near-infrared avalanche photodiode performance by femtosecond laser microstructuring}, journal = {Appl. Opt.}, volume = {45}, year = {2006}, pages = {8825{\textendash}8831}, abstract = {A processing technique using femtosecond laser pulses to microstructure the surface of a silicon ava- lanche photodiode (APD) has been used to enhance its near-infrared (near-IR) response. Experiments were performed on a series of APDs and APD arrays using various structuring parameters and post- structuring annealing sequences. Following thermal annealing, we were able to fabricate APD arrays with quantum efficiencies as high as 58\% at 1064 nm without degradation of their noise or gain performance. Experimental results provided evidence to suggest that the improvement in charge collec- tion is a result of increased absorption in the near-IR.}, url = {/files/mazur/files/rep_595.pdf}, author = {R. A. Myers and R. Farrell and A. Karger and J. E. Carey and Mazur, E.} }