@article {Shen:170,
	title = {Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask},
	journal = {Appl. Phys. Lett.},
	volume = {82},
	year = {2003},
	pages = {1715{\textendash}1717},
	abstract = {We report fabrication of regular arrays of silicon microspikes by femtosecond laser irradiation of a silicon wafer covered with a periodic mask. Without a mask, microspikes form, but they are less ordered. We believe that the mask imposes order by diffracting the laser beam and providing boundary conditions for capillary waves in the laser-melted silicon.},
	doi = {10.1063/1.1561162},
	url = {/files/mazur/files/rep_170.pdf},
	author = {M. Shen and C. H. Crouch and J. E. Carey and R. J. Younkin and Mazur, E. and M. A. Sheehy and Friend, C. M.}
}
