@article {Smith:688,
	title = {The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation},
	journal = {J. Appl. Phys.},
	volume = {112},
	year = {2012},
	pages = {083518{\textendash}},
	abstract = {Surface texturing of silicon using femtosecond (fs) laser irradiation can reduce the surface reflectivity to less than 5\%, enables control over the resulting surface morphology, and uses little material. The laser-induced damage that occurs in parallel with surface texturing, however, can result in increased recombination currents that inhibit device performance. In this work, we investigate the light- material interaction during the texturing of silicon by directly correlating the formation of pressure-induced silicon polymorphs, fs-laser irradiation conditions, and the resulting morphology and microstructure using scanning electron microscopy, Raman spectroscopy, and transmission electron microscopy. We identify resolidification-induced stresses as the mechanism responsible for driving sub- surface phase transformations during the surface texturing of silicon, the understanding of which is an important first step towards reducing laser-induced damage during the texturing of silicon with fs-laser irradiation.},
	doi = {10.1063/1.4759140},
	url = {/files/mazur/files/rep_688.pdf},
	author = {M. J. Smith and M. Sher and B. Franta and Y. Lin and Mazur, E. and S. Grade{\v c}ak}
}
