@article {Tull:580,
	title = {Surface morphologies of silicon surfaces after femtosecond laser irradiation},
	journal = {Mat. Res. Soc. Bull.},
	volume = {31},
	year = {2006},
	pages = {626{\textendash}633},
	abstract = {In this article, we present summaries of the evolution of surface morphology resulting from the irradiation of single-crystal silicon with femtosecond laser pulses. In the first section, we discuss the development of micrometer-sized cones on a silicon surface irradiated with hundreds of femtosecond laser pulses in the presence of sulfur hexafluoride and other gases. We propose a general formation mechanism for the surface spikes. In the second section, we discuss the formation of blisters or bubbles at the interface between a thermal silicon oxide and a silicon surface after irradiation with one or more femtosecond laser pulses. We discuss the physical mechanism for blister formation and its potential use as channels in microfluidic devices.},
	url = {/files/mazur/files/rep_580.pdf},
	author = {B. R. Tull and J. E. Carey and Mazur, E. and J. McDonald and S. M. Yalisove}
}
