%0 Journal Article %J Optics Express %D 2015 %T Multimode phase-matched third-harmonic generation in sub-micrometer-wide anatase TiO2 waveguides %A C. C. Evans %A K. Shtyrkova %A O. Reshef %A M. Gerhard Moebius %A J. D.B. Bradley %A S. Griesse-Nascimento %A E. Ippen %A Mazur, E. %X Third-harmonic generation (THG) has applications ranging from wavelength conversion to pulse characterization, and has important implications for quantum sources of entangled photons. However, on-chip THG devices are nearly unexplored because bulk techniques are difficult to adapt to integrated photonic circuits. Using sub- micrometer-wide polycrys- talline anatase TiO2 waveguides, we demonstrate third-harmonic generation on a CMOS-compatible platform. We correlate higher conversion effi- ciencies with phase-matching between the fundamental pump mode and higher-order signal modes. Using scattered light, we estimate conversion efficiencies as high as 2.5% using femtosecond pulses, and thus demonstrate that multimode TiO2 waveguides are promising for wideband wavelength conversion and new applications ranging from sensors to triplet-photon sources. %B Optics Express %V 23 %P 7832–7841 %G eng %U /files/mazur/files/rep_749.pdf %R 10.1364/OE.23.007832