Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces

Citation:

J. E. Carey, C. H. Crouch, and E. Mazur. 2003. “Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces.” In Optics and Photonics News, 14: Pp. 32–36.

Abstract:

The authors present a technique for microstructuring silicon surfaces using femtosecond-laser-assisted chemical etching. The microstructuring process dramatically changes both the surface morphology and the optoelectronic properties. The authors discuss the reasons behind these changes and the possibilities for new uses in photodetector, sensor and display applications.