Citation:
M. Shen, C. H. Crouch, J. E. Carey, R. J. Younkin, E. Mazur, M. A. Sheehy, and C. M. Friend. 2003. “Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask.” Appl. Phys. Lett., 82, Pp. 1715–1717. Publisher's Version
Abstract:
We report fabrication of regular arrays of silicon microspikes by femtosecond laser irradiation of a silicon wafer covered with a periodic mask. Without a mask, microspikes form, but they are less ordered. We believe that the mask imposes order by diffracting the laser beam and providing boundary conditions for capillary waves in the laser-melted silicon.See also: Optical hyperdoping: black silicon