Integrated TiO2 resonators for visible photonics


J. Choy, J. D.B. Bradley, P. Deotare, I. B. Burgess, C. C. Evans, E. Mazur, and M. Loncar. 2012. “Integrated TiO2 resonators for visible photonics.” Opt. Lett., 37, Pp. 539–541. Publisher's Version


We demonstrate waveguide-coupled titanium dioxide (TiO2) racetrack resonators with loaded quality factors of 2.2 × 104 for the visible wavelengths. The structures were fabricated in sputtered TiO2 thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measure- ments using a tunable red laser.
Last updated on 07/24/2019