Integrated TiO2 resonators for visible photonics

Citation:

J. Choy, J. D.B. Bradley, P. Deotare, I. B. Burgess, C. C. Evans, E. Mazur, and M. Loncar. 2012. “Integrated TiO2 resonators for visible photonics.” Opt. Lett., 37, Pp. 539–541. Publisher's Version

Abstract:

We demonstrate waveguide-coupled titanium dioxide (TiO2) racetrack resonators with loaded quality factors of 2.2 × 104 for the visible wavelengths. The structures were fabricated in sputtered TiO2 thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measure- ments using a tunable red laser.
Last updated on 07/24/2019