Micromachining and material change characterization using femtosecond laser oscillators


C. B. Schaffer, J. Aus der Au, E. Mazur, and J. A. Squier. 2002. “Micromachining and material change characterization using femtosecond laser oscillators.” In . Photonics West. Publisher's Version


We use third harmonic generation (THG) microscopy to image waveguides and single-shot structural modifications produced in bulk glass using femtosecond laser pulses. THG microscopy reveals the internal structure of waveguides written with a femtosecond laser oscillator, and gives a three-dimensional view of the complicated morphology of the structural changes produced with single, above-threshold femtosecond pulses. We find that THG microscopy is as sensitive to refractive index change as differential interference contrast microscopy, while also offering the three-dimensional sectioning capabilities of a nonlinear microscopy technique. It is now possible to micromachine three- dimensional optical devices and to image these structures in three dimensions, all with a single femtosecond laser oscillator.
Last updated on 07/24/2019