Black silicon: A new light absorber for solar cells and photodetectors

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1998. “Black Silicon: A New Light Absorber for Solar Cells and Photodetectors”

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We demonstrate a new light absorber for solar cells and optical detection devices. Micron-sized spikes generated by irradiating a silicon surface with femtosecond laser pulses in SF6 enhance light absorption in silicon to near 100%. We observe an increase of more than 60% in photocurrent compared to a flat silicon surface.