Femtosecond laser-assisted microstructuring of silicon surfaces for novel detector, sensing, and display technologies
Publication information:
2004. “Femtosecond Laser-Assisted Microstructuring of Silicon Surfaces for Novel Detector, Sensing, and Display Technologies”
Full text
Irridiating silicon surfaces with trains of ultrashort laser pulses in the presence of a sulfur containing gas drastically changes the structure and properties of silicon. The normally smooth and highly reflective surface develops a forest of sharp microscopic spikes. The microstructured surface is highly absorbing even at wavelengths beyond the bandgap of silicon and has many interesting novel applications.