Micromachining optical waveguides using a femtosecond laser oscillator

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2000. “Micromachining Optical Waveguides Using a Femtosecond Laser Oscillator”

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By tightly focusing femtosecond laser pulses, we achieve optical breakdown in a transparent material using only nanojoules of laser energy. Localized structural changes are produced in the focal volume and used for bulk micromachining. Using this technique, we fabricate single-mode optical waveguides and other photonics devices inside bulk glass.