Presentation Date:
Tuesday, November 9, 2010
Location:
IEEE Photonics Society Annual Meeting, IEEE Photonics Society (Denver, CO)
Presentation Slides:
We deposit TiO2 planar waveguides on oxidized silicon substrates by reactive sputtering. The films exhibit Raman spectra consistent with an amorphous or anatase phase and have losses as low as 0.4 dB/cm at 826 nm.