Fabrication of micrometer-sized conical field emitters using femtosecond laser-assisted etching of silicon

Presentation Date: 

Tuesday, August 14, 2001

Location: 

IVMC 2001, University of California (Davis, CA)

Presentation Slides: 

Arrays of sharp, conical microstructures were obtained by structuring the surface of a silicon wafer using femtosecond laser-assisted etching. Analysis of the arrays shows high, stable field emission without any further processing steps.