Fabrication of micrometer-sized conical field emitters using femtosecond laser-assisted etching of silicon
Publication information:
2001. “Fabrication of Micrometer-Sized Conical Field Emitters Using Femtosecond Laser-Assisted Etching of Silicon”
Full text
Arrays of sharp, conical microstructures were obtained by structuring the surface of a silicon wafer using femtosecond laser-assisted etching. Analysis of the arrays shows high, stable field emission without any further processing steps.