Femtosecond laser-assisted microstructuring of silicon surfaces for novel detector, sensing, and display technologies
Publication information:
2003. “Femtosecond Laser-Assisted Microstructuring of Silicon Surfaces for Novel Detector, Sensing, and Display Technologies”
Full text
Arrays of sharp, conical microstructures are obtained by texturing the surface of a silicon wafer using femtosecond laser-assisted chemical etching. The one step, maskless texturing process drastically changes the optical, material and electronic properties of the original silicon wafer.