Femtosecond laser-assisted microstructuring of silicon surfaces for novel detector, sensing, and display technologies

Presentation Date: 

Sunday, October 26, 2003


LEOS 2003 Annual Meeting (Tucson, AZ)

Presentation Slides: 

Arrays of sharp, conical microstructures are obtained by texturing the surface of a silicon wafer using femtosecond laser-assisted chemical etching. The one step, maskless texturing process drastically changes the optical, material and electronic properties of the original silicon wafer.