Fabrication of Waveguide-Based Vibration Sensors by Femtosecond Laser Micromachining
Publication information:
2005. “Fabrication of Waveguide-Based Vibration Sensors by Femtosecond Laser Micromachining”
Full text
We report the fabrication of vibration sensors using femtosecond lasers for the first time to our knowledge. These sensors show linear frequency response to input vibrations and an acceleration sensitivity below 0.01 m/s2.