Fabrication of Waveguide-Based Vibration Sensors by Femtosecond Laser Micromachining

Presentation Date: 

Thursday, May 26, 2005


2005 CLEO/QELS Conference (Baltimore, MD)

Presentation Slides: 

We report the fabrication of vibration sensors using femtosecond lasers for the first time to our knowledge. These sensors show linear frequency response to input vibrations and an acceleration sensitivity below 0.01 m/s2.